Agilent optical position sensing technology
Agilent optical position sensing technology is a research investigation to develop an optical position sensor for wafer steppers and other position sensing applications. This sensor could augment a laser interferometer position sensor for coarse positioning to the location where the laser sensor is used for precise positioning.
Company
Agilent Technologies, Inc. (now under Keysight Technologies, Inc.)
Design Engineer
Product Design and Development Areas
Optical position sensing algorithm
Wrote a simulation of the position sensing algorithm in SciLab. Demonstrated the simulation functionality for sensing the positon of an optical target having a pattern below the sensor Nyquist spacial frequency.
Optical position sensor target
Researched technologies for optical position sensor targets. Defined a target based on technology similar to optical masks for integrated circuit photolithography.